Вестник Нижегородского университета им. Н.И. Лобачевского. Серия: Социальные науки

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Title of Article

IONIC SPUTTERING EFFECT ON AU NANOPARTICLE FORMATION BY ION IMPLANTATION IN YTTRIA-STABILIZED ZIRCONIA FILMS

Issue	1
Date	2014

Article type	scientific article	UDC	538.975
Pages	80-83	Keywords	magnetron sputtering method, stabilized zirconia, ion implantation, transmission electron microscopy, metal nanoparticles, sputtering yield

Authors

Koryazhkina M.N.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Gorshkov O.N.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Pavlov D.A.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Antonov I.N.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Kasatkin A.P.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Malekhonova N.V.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Shenina M.E.Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Abstract

Yttria-stabilized zirconia films implanted with multicharged Au ions at an average energy of 160 keV and the fluence of 4

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